我所纳米尺度表面加工论文（郭美玲/刁东风）在Applied Surface Science发表阅读次数 [3568] 发布时间 :2015-09-20 10:33:31

我所论文：Restructured graphene sheets embedded carbon film by oxygenplasma etching and its tribological properties

，发表于国际期刊Applied Surface Science。

Restructured graphene sheets embedded carbon film by oxygenplasma etching and its tribological properties

Applied Surface Science 357 (2015) 771–776（PDF-File）

Meiling Guo, Dongfeng Diao*, Lei Yang, Xue Fan

An oxygen plasma etching technique was introduced for improving the tribological properties of thegraphene sheets embedded

    carbon (GSEC) film in electron cyclotron resonance plasma processing system.The nanostructural changing in the film caused by oxygen plasma etching was examined by transmissionelectron microscope, Raman spectroscopy and X-ray photoelectron spectroscopy, showing that the 3 nmthick top surface layer was restructured with smaller graphene nanocrystallite size as well as higher sp3bond fraction. The surface roughness, mechanical behavior and tribological properties of the original GSECand oxygen plasma treated GSEC films were compared. The results indicated that after the oxygen plasmatreatment, the average roughness decreased from 20.8 ± 1.1 nm to 1.9 ± 0.1 nm, the hardness increasedfrom 2.3 ± 0.1 GPa to 2.9 ± 0.1 GPa, the nanoscratch depth decreased from 64.5 ± 5.4 nm to 9.9 ± 0.9 nm,and the wear life increased from 930 ± 390 cycles to more than 15,000 frictional cycles. The origin of theimproved tribological behavior was ascribed to the 3 nm thick graphene nanocrystallite film. This findingcan be expected for wide applications in nanoscale surface engineering.