INTRODUCTION:

The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool, which takes measurements electromechanically by moving a diamond-tipped stylus over the sample surface according to a programmed scan length, speed, and stylus force. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Furthermore, three-dimensional morphology image can be obtained by multi-line scanning. The apparatus costs 0.3 million Yuan.

SPECIFICATION:

1. Step height reproducibility ≤5Å (1 um standard step)

2. Manual sample-positioning stage with 14 x 4 inches, the movement ranges in 100 mm×100 mm of X-Y translation

3. Highest vertical resolution along z direction ≤1 Å

4. Vertical measurement range 0-1 mm

5. Loading on the head 1-15 mg, adjustable with software before breaking the sample

6. 2 Diamond tips with curvature radius of 2 um

7. One standard sample with 1 um in size and One slit tip (VLSI Calibration certificates)

8. Equipped with step auto-detect software, roughness analysis software, and stress measurement software

9. Scan length >50 mm

10. Vision64 operation system

11. Easy and quick tip replacement (convenient and safe)

12. Sample size with 50 mm in height

13. Data acquisition ≥120,000/scan

14. Sample sight: controllable magnification from 1 to 4 mmFOV

Main application

Qualitative and quantitative measurements of the surface 3D morphology, slit depth, film thickness, growth/etching rate and the surface roughness during the nanosurface manufacturing processes like micro/nano manufacturing, film growth/etching, and supersmooth fabricating.