INTRODUCTION:
The 200 m2 Ten thousand-class clean room of INSE is the lab to conduct researches on nanosurface manufacturing, test and application. The clean room has individually central air conditioner and 150 kW power system, and the room contains the switchboard room, gas room, changing room, Air Shower room, labs and visit corridor around the labs. For safety, the clean room is equipped with danger gas alarm and fire alarm. The functionized part in the clean room contains 1 large lab, and 6 small labs, and 2 hundred-class clean space for opening the experimental hard disk. All the labs are provided separate gas path connector to study the nanosurface behaviors in different gas environments, and specialized gas emission path is connect with the stink cupboard to conduct particular experiments. The clean room costs 833,300 Yuan.
