INSE published paper on Surface & Coatings TechnologyViews [3456] Delivery time :2016-04-14 11:01:39

我所论文：ECR  sputtering and electron/ion alternative irradiation for multilayer  carbon films fabrication with tunable layer thickness，发表于国际期刊Surface  & Coatings Technology。

ECR sputtering and electron/ion alternative irradiation for multilayer carbon films fabrication with tunable layer thickness

Surface & Coatings Technology 296 (2016), 26–32

Peidong Xue, Lei Yang,Dongfeng Diao

In  this work, we proposed a method of electron cyclotron resonance (ECR)  sputtering and electron/ion alternative irradiation to formmultilayer  carbon filmswith different single layer thicknesses. The soft electron  irradiated layers and protective ion irradiated layers were deposited as  the component layers. The transmission electron microscopy (TEM) and  Raman spectra proved that the graphene sheets structure in electron  irradiated layers could be preserved in multilayer carbon films. We  found a rule of the dependence of the surface roughness, mechanical and  tribological properties of themultilayer films on the single layer  thickness. With the decrease of single layer thickness, the surface  roughness decreased and the mechanical and tribological properties  improved notably. The mechanisms of the long wear life with low friction  coefficient were further discussed based on the hardness enhancement  and the cracking length limitation. This work indicated that by  decreasing the single layer thickness, ECR sputtering and electron/ion  alternative irradiation can fabricate films with combined properties of  the component materials, which can be expected for broad nanolayered  surface science and engineering applications.