Our institute Publish papers on Applied Surface ScienceViews [3569] Delivery time :2015-09-20 10:33:31
Restructured graphene sheets embedded carbon film by oxygenplasma etching and its tribological properties
Applied Surface Science 357 (2015) 771–776（PDF-File）
Meiling Guo, Dongfeng Diao*, Lei Yang, Xue Fan
An oxygen plasma etching technique was introduced for
improving the tribological properties of thegraphene sheets embedded
carbon
(GSEC) film in electron cyclotron resonance plasma processing system.The
nanostructural changing in the film caused by oxygen plasma etching was examined
by transmissionelectron microscope, Raman spectroscopy and X-ray photoelectron
spectroscopy, showing that the 3 nmthick top surface layer was restructured with
smaller graphene nanocrystallite size as well as higher sp3bond fraction. The
surface roughness, mechanical behavior and tribological properties of the
original GSECand oxygen plasma treated GSEC films were compared. The results
indicated that after the oxygen plasmatreatment, the average roughness decreased
from 20.8 ± 1.1 nm to 1.9 ± 0.1 nm, the hardness increasedfrom 2.3 ± 0.1 GPa to
2.9 ± 0.1 GPa, the nanoscratch depth decreased from 64.5 ± 5.4 nm to 9.9 ± 0.9
nm,and the wear life increased from 930 ± 390 cycles to more than 15,000
frictional cycles. The origin of theimproved tribological behavior was ascribed
to the 3 nm thick graphene nanocrystallite film. This findingcan be expected for
wide applications in nanoscale surface engineering.