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Three-layered sandwich structured carbon film prepared by sputtering and ion/electron/ion alternative irradiation
Surface & Coatings Technology 278 (2015), 12-17(PDF-File)
Wenlei Zhang, Dongfeng Diao*, Xue Fan
The electron irradiated carbon film based on electron cyclotron resonance
(ECR) sputtering technology has been proved tohave both
high conductivity and paramagnetism. However, the relatively low hardness, wear
life and high surface roughness value limit its application in
Micro-electromechanical Systems (MEMS). To improve these properties, the
sandwich structured carbon films with different modulation ratios were
introduced on silicon (100) wafers by alternative irradiation (ion/electron/ion)
technique in ECR sputtering system. The three-layered anostructure of films was
measured with a transmission electron microscopy (TEM). The surface roughness of
the film can be controlled to 0.19 nm according to the measurement of atomic
force microscope (AFM). The unique characteristics of electron irradiated layer
remained stable after irradiation through the analyzing of Raman spectroscopy.
The mechanical properties (including hardness, elastic modulus, fracture
behavior) and wear life were improved significantly due to the sandwich
structure. The results showed that the sandwich structured carbon film is a kind
of functional material equipped with enhanced mechanical and tribological
properties.