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Three-layered sandwich structured carbon film prepared by sputtering and ion/electron/ion alternative irradiation

Surface & Coatings Technology 278 (2015), 12-17(PDF-File)

Wenlei Zhang, Dongfeng Diao*, Xue Fan

     The electron irradiated carbon film based on electron cyclotron resonance (ECR) sputtering technology has been proved tohave both high conductivity and paramagnetism. However, the relatively low hardness, wear life and high surface roughness value limit its application in Micro-electromechanical Systems (MEMS). To improve these properties, the sandwich structured carbon films with different modulation ratios were introduced on silicon (100) wafers by alternative irradiation (ion/electron/ion) technique in ECR sputtering system. The three-layered  anostructure of films was measured with a transmission electron microscopy (TEM). The surface roughness of the film can be controlled to 0.19 nm according to the measurement of atomic force microscope (AFM). The unique characteristics of electron irradiated layer remained stable after irradiation through the analyzing of Raman spectroscopy. The mechanical properties (including hardness, elastic modulus, fracture behavior) and wear life were improved significantly due to the sandwich structure. The results showed that the sandwich structured carbon film is a kind of functional material equipped with enhanced mechanical and tribological properties.