Dr. Pengfei Wang Publish papers on Materials Chemistry and PhysicsViews [2127] Delivery time :2014-04-04 15:43:31

          Dr. Pengfei Wang has published a paper titled as “Effects  of substrate bias voltage and target sputtering power on the structural and  tribological properties of carbon nitride coatings”  on Materials  Chemistry and Physics.

Effects  of substrate bias voltage and target sputtering power on  the structural  and tribological properties of carbon nitride coatings

   Materials Chemistry and  Physics, 145,434  (2014)

   Pengfei Wang *, Takanori Takeno, Julien  Fontaine,  Masami Aono, Koshi Adachi, Hiroyuki  Miki, and Toshiyuki Takagi.

Effects  of substrate bias voltage and target sputtering power on the structural and  tribological properties of carbon nitride(CNx)coatings are investigated. CNx coatings are  fabricated by a hybrid coating process with  the combination of radio frequency plasma enhanced chemical vapor deposition (RF  PECVD) and DC magnetron  sputtering at various substrate bias voltage and target sputtering power in the  order of 400  V 200W, 400 V 100W, 800 V 200W, and 800 V 100W. The deposition rate, N/C  atomic ratio, and  hardness of CNx coatings as well as friction coefficient of CNx coating sliding  against AISI 52100 pin in N2  gas stream decrease, while the residual stress of CNx coatings increases with  the increase of substrate bias  voltage and the decrease of target sputtering power. The highest hardness  measured under single stiffness  mode of 15.0 GPa and lowest residual stress of 3.7 GPa of CNx coatings are  obtained at 400 V 200W,  whereas the lowest friction coefficient of 0.12 of CNx coatings is achieved at  800 V 100W. Raman  and XPS analysis suggest that sp3 carbon bonding decreases and sp2 carbon  bonding increases with  the variations in substrate bias voltage and target sputtering power. Optical  images and Raman characterization  of worn surfaces confirm that the friction behavior of CNx coatings is  controlled by the directly  sliding between CNx coating and steel pin. Therefore, the reduction of friction  coefficient is attributed  to the decrease of sp3 carbon bonding in the CNx coating. It is concluded that  substrate bias voltage  and target sputtering power are effective parameters for tailoring the  structural and tribological properties  of CNx coatings.

 Other  Publications:  http://nanosurface.szu.edu.cn/cn/res_detail.php?id=210